By Volker Kempe
A realistic and systematic review of the layout, fabrication and try out of MEMS-based inertial sensors, this entire and rigorous consultant indicates you the way to investigate and rework software standards into sensible designs, and enables you to keep away from capability pitfalls and to chop layout time. With this ebook you will soon be on top of things at the suitable fundamentals, together with MEMS applied sciences, packaging, kinematics and mechanics, and transducers. you are going to additionally get a radical assessment of alternative ways and architectures for layout and an summary of key elements of trying out and calibration. designated insights into the sensible problems of constructing sensors for real-world functions make this up to date description of the cutting-edge in inertial MEMS an excellent source for pro engineers in in addition to scholars searching for a whole creation to the realm.