Capture Pumping Technology by K. Welch

By K. Welch

It is a useful textbook written to be used by means of engineers, scientists and technicians. it's not meant to be a rigorous clinical therapy of the subject matter, as this could fill numerous volumes. particularly, it introduces the reader to the basics of the subject matter, and gives enough references for an in-depth examine of the topic through the technologist. the writer has an entire life educating credential within the California group university method. additionally, he has taught technical classes with the yank Vacuum Society for approximately 35 years. scholars attending a lot of those periods have backgrounds various from high-school graduates to Ph.D.s in technical disciplines. this is often an exceptionally tricky category profile to educate. This ebook nonetheless endeavors to arrive this comparable viewers. simple algebra is needed to grasp many of the fabric. yet, the calculus is utilized in derivation of a few of the equations. the writer dangers use of the 1st individual I , rather than the writer , and you rather than the reader . either are considered in bad flavor whilst writing for e-book within the clinical group. although, I am scripting this e-book for you as the topic is interesting, and that i take pleasure in instructing you, might be, anything new. The ebook is written extra within the vein of a one-on-one dialogue with you, instead of the writer lecturing to the reader. There are anecdotes, and examples of a few disasters and successes i've got had during the last forty-five years in vacuum comparable actions, i'm going to attempt to not understate both. finally, there are a number of equations which if memorised might help you as a vacuum technician. There are below a dozen equations and part that many principles of thumb to memorize, so that it will be drawn on time an back in designing, working and trouble-shooting any vacuum procedure.

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This will be discussed in the section on sputter-ion pumps. 1) Vavg ), ¢ c v = r/ E c v, where p is the gas density, c v the specific heat of the gas at constant volume. We have already defined ), and Vav . The term 17 is defined as the viscosity of the gas. 1) is ]erived from elementary kinetic theory. 2) and for monatomic gases 3' = 5/3, where for polyatomic gases 3, --1. The thermal conductivity of gases is particularly important in understanding the limitations of various forms of cryopumps.

1, with a nitrogen pressure, P, in the chamber. The density of molecules in the chamber is simply the total number of molecules in the chamber, divided by the total volume. 3), and noting there are 10 a Z / m a , w e h a v e : PN o v = 10 3 kT (_____ } t / 2 . 5) the flux density, v, is given in particles per square meter. 51 x 10 2 2 p / (MT) t / 2 . 88 × 10 2 o p molecules/cm2-sec. 7) is an extremely useful equation for developing a feel for the physics going on in your vacuum system. For example, assume that every molecule which strikes some special surface in your system sticks to that surface.

1 a. 14. b. t see BASIC T H E O R Y 29 Similarly, we may solve for current, 12 (t), as a function of a second voltage source, V e 2 (t), in the circuit of Fig. , the same conductance)" 12 (t) = G x Ve2 (t). 2a. 2b. 2). 3) + o x v (t). Or, It(t ) = G x [Vel(t) + Ve2(t)]. 4) This total resultant current as a function of time, It(t), is depicted in Fig. 3b. 4), we may express the total voltage imposed on the circuits as the algebraic sum of Ve 1 and Ve 2. , z G=I/ L) i. 3a. 3b. The correspondence in a linear vacuum circuit might relate to the following cases.

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