An Introduction to Microelectromechanical Systems by Nadim Maluf, Kirt Williams

By Nadim Maluf, Kirt Williams

Bringing you recent with the newest advancements in MEMS expertise, this significant revision of the best-selling An creation to Microelectromechanical platforms Engineering provides you with a present realizing of this state of the art know-how. You achieve sensible wisdom of MEMS fabrics, layout, and production, and learn the way it truly is being utilized in commercial, optical, clinical and digital markets. the second one variation positive factors fresh sections on RF MEMS, picture MEMS, micromachining on fabrics except silicon, reliability research, plus an accelerated reference record.

With an emphasis on commercialized items, this particular source is helping you identify no matter if your program can make the most of a MEMS answer, know how different purposes and firms have benefited from MEMS, and choose and outline a manufacturable MEMS approach on your program. you find the right way to use MEMS expertise to allow new performance, enhance functionality, and decrease dimension and value. The booklet teaches you the features and boundaries of MEMS units and tactics, and is helping you speak the relative advantages of MEMS for your company’s administration. From serious discussions on layout operation and method fabrication of units and platforms, to a radical clarification of MEMS packaging, this easy-to-understand booklet essentially explains the fundamentals of MEMS engineering, making it a useful reference to your paintings within the box.

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Extra resources for An Introduction to Microelectromechanical Systems Engineering (2nd Edition)

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12, 1987, pp. 129–144. , “Silicon Carbide MEMS for Harsh Environments,” Proceedings of the IEEE, Vol. 86, No. 8, August 1998, pp. 1594–1610. [9] Zorman, C. , and M. Mehregany, “Materials for Microelectromechanical Systems,” in The MEMS Handbook, Chapter 15, M. ), Boca Raton, FL: CRC Press, 2002. [10] Zhang, Z. , and N. C. MacDonald, “Fabrication of Submicron High-Aspect-Ratio GaAs Actuators,” Journal of Microelectromechanical Systems, Vol. 2, No. 2, June 1993, pp. 66–73. , T. A. S. Srinivas, and H.

Crystallographic planes play an important role in the design and fabrication of silicon-based MEMS and affect some material properties of silicon. Three physical effects commonly used in the operation of micromachined sensors and actuators were introduced: piezoresistivity, piezoelectricity, and thermoelectricity. References [1] Ashcroft, N. , and N. D. Mermin, Solid State Physics, Philadelphia, PA: Saunders College, 1976, pp. 91–93. , Polycrystalline Silicon for Integrated Circuits, Boston, MA: Kluwer Academic Publishers, 1988.

The angle between {100} and {111} planes is of particular importance in micromachining because many alkaline aqueous solutions, such as potassium hydroxide (KOH), selectively etch the {100} planes of silicon but not the {111} planes (discussed in detail in Chapter 3). 2). Material manufacturers cut thin circular wafers from large silicon boules along specific crystal planes. The cut plane—the top surface of the wafer—is known as the orientation cut. The (100) wafers dominate in both MEMS and CMOS technology, but wafers are also readily available with (111) orientation and, to a lesser degree, (110) orientation.

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